The Micro-Nano Platform is dedicated to pioneering research and development at the micro- and nano-scales. It provides comprehensive R&D services in critical areas, including micro-nano optoelectronics, micro-nano electronics, sensors, photonic devices, power chips, and biochips. The platform's work accelerates the application of micro-nano technology across vital sectors such as healthcare, communications, energy, and defense.
The Micro-Nano Center has completed its Phase I procurement to establish the platform's foundational infrastructure. In the upcoming period, it plans to acquire advanced research instruments including stepper lithography systems, dual-chamber inductively coupled plasma etchers (ICP), secondary ion mass spectrometers (SIMS), and plasma-enhanced atomic layer deposition (PE-ALD) systems. This instrumentation will form the core of its microelectronics processing and integrated circuit testing capabilities, enabling integrated circuit design and manufacturing and address challenges in chip fabrication and novel device development.
